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High resolution electron microscopy for semiconductor materials

dc.contributor.authorVan Landuyt, J.
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T12:49:55Z
dc.date.available2021-09-29T12:49:55Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/398
dc.sourceIIOimport
dc.titleHigh resolution electron microscopy for semiconductor materials
dc.typeBook chapter
dc.source.peerreviewno
dc.source.beginpage1109
dc.source.bookHandbook on Semiconductors. Vol. 3a: Materials, Properties and Preparations
dc.source.endpage1147
imec.availabilityPublished - imec
imec.internalnotes2nd edition


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