A capacitive MEMS energy harvester for shock-induced periodic excitations

Abstract

In this paper a simulation of MEMS energy harvester for shock-induced periodic excitations is presented. A brief overview of state-of-the-art solutions for various shock applications is given, and basic types of harvesting systems are described. A basic lumped model of shock energy harvester is developed, which includes a mechanical part with nonlinear springs and stoppers and a typical interface power extraction circuit. It is shown that a power output of >100 mu W can be produced with a compact MEMS energy harvester under typical shock-induced periodic excitation. The power conversion efficiency can be further improved by system-level parameter optimization.