Inspection and metrology challenges for 3 nm node devices and beyond

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dc.contributor.author	Shohjoh, T.
dc.contributor.author	Ikota, M.
dc.contributor.author	Isawa, M.
dc.contributor.author	Lorusso, G. F.
dc.contributor.author	Horiguchi, N.
dc.contributor.author	Briggs, B.
dc.contributor.author	Mertens, H.
dc.contributor.author	Bogdanowicz, J.
dc.contributor.author	De Bisschop, P.
dc.contributor.author	Charley, A-L
dc.date.accessioned	2022-07-09T02:28:03Z
dc.date.available	2022-07-09T02:28:03Z
dc.date.issued	2021
dc.identifier.issn	2380-9248
dc.identifier.other	WOS:000812325400209
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40097
dc.source	WOS
dc.title	Inspection and metrology challenges for 3 nm node devices and beyond
dc.type	Proceedings paper
dc.contributor.imecauthor	Lorusso, G. F.
dc.contributor.imecauthor	Horiguchi, N.
dc.contributor.imecauthor	Briggs, B.
dc.contributor.imecauthor	Mertens, H.
dc.contributor.imecauthor	Bogdanowicz, J.
dc.contributor.imecauthor	De Bisschop, P.
dc.contributor.imecauthor	Charley, A-L
dc.identifier.doi	10.1109/IEDM19574.2021.9720711
dc.identifier.eisbn	978-1-6654-2572-8
dc.source.numberofpages	4
dc.source.peerreview	yes
dc.source.conference	IEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedate	DEC 11-16, 2021
dc.source.conferencelocation	San Francisco
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/40097.2	2022-07-12T10:24:42Z	validation by library/open access desk
1	20.500.12860/40097*	2022-07-09T02:28:03Z