Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

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dc.contributor.author	Marinins, A.
dc.contributor.author	Kjellman, J.
dc.contributor.author	Caer, C.
dc.contributor.author	David, T.
dc.contributor.author	Rottenberg, X.
dc.contributor.author	Jansen, R.
dc.contributor.author	Soussan, P.
dc.date.accessioned	2022-09-09T02:41:55Z
dc.date.available	2022-09-09T02:41:55Z
dc.date.issued	2021
dc.identifier.issn	2160-9020
dc.identifier.other	WOS:000831479803276
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40402
dc.source	WOS
dc.title	Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
dc.type	Proceedings paper
dc.contributor.imecauthor	Marinins, A.
dc.contributor.imecauthor	Kjellman, J.
dc.contributor.imecauthor	Caer, C.
dc.contributor.imecauthor	David, T.
dc.contributor.imecauthor	Rottenberg, X.
dc.contributor.imecauthor	Jansen, R.
dc.contributor.imecauthor	Soussan, P.
dc.identifier.eisbn	978-1-943580-91-0
dc.source.numberofpages	2
dc.source.peerreview	yes
dc.source.conference	Conference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedate	MAY 09-14, 2021
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/40402.2	2022-09-22T12:11:13Z	validation by library/open access desk
1	20.500.12860/40402*	2022-09-09T02:41:55Z