Broadband Characterization of Polymers under Reliability Stresses and Impact of Capping Layer

Abstract

This work presents the broadband characterization of the electrical properties up to 110 GHz of a polymer before and after high temperature storage reliability stresses in the presence and absence of a thin inorganic capping layer. The latter is made of successive layers of HfO2, Al2O3, and HfO2 for a total thickness of 45 nm. The measurement results show that in the presence of the protective capping layer, the electrical properties of the polymer are stable with less than 1 % and 7.5 % variation after 1000 hours of HTS stress for the relative permittivity and loss tangent, respectively. For the unprotected polymer, variations of 2.3 % and 32 % are observed for the relative permittivity and the loss tangent, respectively.