Notice

This item has not yet been validated by imec staff.

Notice

This is not the latest version of this item. The latest version can be found at: https://imec-prod.atmire.com/handle/20.500.12860/41447.2

Show simple item record

dc.contributor.authorQuack, Niels
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorEdinger, Pierre
dc.contributor.authorJo, Gaehun
dc.contributor.authorBleiker, Simon J.
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorNiklaus, Frank
dc.contributor.authorKhan, Umar
dc.contributor.authorVerheyen, Peter
dc.contributor.authorMallik, Arun Kumar
dc.contributor.authorLee, Jun Su
dc.contributor.authorJezzini, Moises
dc.contributor.authorMorrissey, Padraic
dc.contributor.authorAntony, Cleitus
dc.contributor.authorO'Brien, Peter
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2023-04-14T03:56:42Z
dc.date.available2023-04-14T03:56:42Z
dc.date.issued2023-MAR 20
dc.identifier.issn2055-7434
dc.identifier.otherWOS:000956092800002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41447
dc.sourceWOS
dc.titleIntegrated silicon photonic MEMS
dc.typeJournal article
dc.contributor.imecauthorKhan, Umar
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.identifier.doi10.1038/s41378-023-00498-z
dc.source.numberofpages22
dc.source.peerreviewyes
dc.source.journalMICROSYSTEMS & NANOENGINEERING
dc.identifier.pmidMEDLINE:36949734
dc.source.issue1
dc.source.volume9
imec.availabilityUnder review


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

VersionItemDateSummary

*Selected version