Show simple item record

Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorHellemans, L.
dc.contributor.authorSnauwaerts, Jan
dc.date.accessioned2021-09-29T12:50:55Z
dc.date.available2021-09-29T12:50:55Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/418
dc.sourceIIOimport
dc.titleLateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceAmerican Vacuum Society Meeting; October 24-28, 1994; Denver, USA.
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record