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Silicon material challenges for (sub) 100 nm technologies

dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-14T12:44:05Z
dc.date.available2021-10-14T12:44:05Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4192
dc.sourceIIOimport
dc.titleSilicon material challenges for (sub) 100 nm technologies
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference10th Wacker Symposium
dc.source.conferencedate3/11/2000
dc.source.conferencelocationBurghausen Germany
imec.availabilityPublished - imec
imec.internalnotes


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