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Direct yield prediction from SEM images

dc.contributor.authorChoona, Lilach
dc.contributor.authorLinshiz, Jasmine
dc.contributor.authorPres, Shaul
dc.contributor.authorLevant, Boris
dc.contributor.authorTal, Noam
dc.contributor.authorSantoro, Gaetano
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorReifsnider, Jason
dc.contributor.authorVadakupudhu Palayam, Senthil
dc.contributor.authorLorusso, Gian
dc.contributor.authorMitard, Jerome
dc.contributor.authorYogev, Shay
dc.date.accessioned2024-06-06T07:41:30Z
dc.date.available2023-07-28T17:39:56Z
dc.date.available2024-06-06T07:41:30Z
dc.date.issued2023
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001022962000020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42237.3
dc.sourceWOS
dc.titleDirect yield prediction from SEM images
dc.typeProceedings paper
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorReifsnider, Jason
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorVadakupudhu Palayam, Senthil
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecBaudot, Sylvain::0009-0009-2671-0784
dc.contributor.orcidimecOpdebeeck, Ann::0000-0001-6737-2456
dc.contributor.orcidimecReifsnider, Jason::0000-0002-4248-4037
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.contributor.orcidimecVadakupudhu Palayam, Senthil::0000-0002-0855-3377
dc.identifier.doi10.1117/12.2658294
dc.identifier.eisbn978-1-5106-6100-4
dc.source.numberofpages9
dc.source.peerreviewyes
dc.source.beginpage124960Q
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12496
imec.availabilityPublished - imec


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320.500.12860/42237.3*2024-06-06T07:38:42Zvalidation by library/open access desk
120.500.12860/422372023-07-28T17:39:56Z

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