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Monitoring of Trace Molecular Impurities in Clean-Room Air

dc.contributor.authorKenis, Karine
dc.contributor.authorMertens, Paul
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorVan Ongeval, Joost
dc.contributor.authorDe Vita, Marie
dc.date.accessioned2025-02-10T14:10:14Z
dc.date.available2023-09-04T10:16:39Z
dc.date.available2025-02-10T14:10:14Z
dc.date.issued2023-08
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42465.2
dc.titleMonitoring of Trace Molecular Impurities in Clean-Room Air
dc.typeProceedings paper
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorVan Ongeval, Joost
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.contributor.orcidimecKenis, Karine::0000-0001-7116-7498
dc.date.embargo9999-12-31
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.beginpage183
dc.source.endpage188
dc.source.conferenceUCPPS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces
dc.source.conferencedate11 -14 September 2023
dc.source.conferencelocationBrugge
dc.source.journalSolid State Phenomena; Vol. 346
imec.availabilityPublished - imec


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220.500.12860/42465.2*2025-02-10T14:07:41Zvalidation by library/open access desk
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