Show simple item record

Crystallinity and composition of Sc1-x(-y)SixP(y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications

dc.contributor.authorPollefliet, Bert
dc.contributor.authorPorret, Clément
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorRosseel, Erik
dc.contributor.authorConard, Thierry
dc.contributor.authorImpagnatiello, Andrea
dc.contributor.authorShimura, Yosuke
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorLoo, Roger
dc.contributor.authorVantomme, Andre
dc.contributor.authorMerckling, Clement
dc.date.accessioned2024-09-19T09:10:03Z
dc.date.available2024-02-16T17:38:06Z
dc.date.available2024-09-19T09:10:03Z
dc.date.issued2024
dc.identifier.issn0021-4922
dc.identifier.otherWOS:001158326800001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43562.2
dc.sourceWOS
dc.titleCrystallinity and composition of Sc1-x(-y)SixP(y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications
dc.typeJournal article
dc.contributor.imecauthorPollefliet, Bert
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorImpagnatiello, Andrea
dc.contributor.imecauthorShimura, Yosuke
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorPorret, Clément
dc.contributor.orcidimecPollefliet, Bert::0000-0003-3663-8842
dc.contributor.orcidimecEveraert, Jean-Luc::0000-0002-0660-9090
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecPiao, Xiaoyu::0000-0002-2204-9636
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecImpagnatiello, Andrea::0000-0002-0923-4642
dc.contributor.orcidimecShimura, Yosuke::0000-0002-1944-9970
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecRosseel, Erik::0000-0002-2737-8391
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.date.embargo9999-12-31
dc.identifier.doi10.35848/1347-4065/ad1f0d
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.beginpageArt. 02SP97
dc.source.endpageN/A
dc.source.journalJAPANESE JOURNAL OF APPLIED PHYSICS
dc.source.issue2
dc.source.volume63
imec.availabilityPublished - imec
dc.description.wosFundingTextWe would like to express sincere thanks to the imec core program members, the European Commission, local authorities, the imec pilot line and the imec material characterization and analysis group for their support. Additionally, we would like to thank the group of Prof. Christophe Detavernier from Ghent University for conducting the in situ XRD measurement. This project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 101007254. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Germany, France, Czech Republic, Austria, Spain, Belgium, Israel.


Files in this item

Thumbnail
Name:
Pollefliet_2024_Jpn._J._Appl._ ...
Size:
1.500Mb
Format:
PDF
Description:
Published version
View/open

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/43562.2*2024-09-19T09:05:33Zvalidation by library/open access desk
120.500.12860/435622024-02-16T17:38:06Z

*Selected version