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Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI

dc.contributor.authorRinaudo, Pietro
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorZhao, Ying
dc.contributor.authorKaczer, Ben
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorDekkers, Harold
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorFranco, Jacopo
dc.date.accessioned2024-09-19T14:52:09Z
dc.date.available2024-08-16T18:28:04Z
dc.date.available2024-09-19T14:52:09Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-6977-9
dc.identifier.issn1541-7026
dc.identifier.otherWOS:001229691100109
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44314.2
dc.sourceWOS
dc.titleLight-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI
dc.typeProceedings paper
dc.contributor.imecauthorRinaudo, Pietro
dc.contributor.imecauthorZhao, Ying
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecRinaudo, Pietro::0000-0001-7676-1306
dc.contributor.orcidimecZhao, Ying::0000-0002-7758-5655
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecBelmonte, Attilio::0000-0002-3947-1948
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.identifier.doi10.1109/IRPS48228.2024.10529432
dc.identifier.eisbn979-8-3503-6976-2
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.conferenceInternational Reliability Physics Symposium (IRPS)
dc.source.conferencedateAPR 14-18, 2024
dc.source.conferencelocationGrapevine
dc.source.journalN/A
imec.availabilityPublished - imec
dc.description.wosFundingTextPietro Rinaudo is supported by a PhD Fellowship of the Research Foundation -Flanders (Belgium) (application number 1SE2723N). We gratefully acknowledge Daisuke Matsubayashi (imec) for providing time-zero characteristics data.


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220.500.12860/44314.2*2024-09-19T14:49:40Zvalidation by library/open access desk
120.500.12860/443142024-08-16T18:28:04Z

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