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Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

dc.contributor.authorDeng, Kerong
dc.contributor.authorErofeev, Ivan
dc.contributor.authorChowdhuri, Angshuman Ray
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorAabdin, Zainul
dc.contributor.authorHartanto, Antony Winata
dc.contributor.authorTjiu, Weng Weei
dc.contributor.authorZhang, Mingsheng
dc.contributor.authorFernando, Devshan
dc.contributor.authorSaidov, Khakimjon
dc.contributor.authorKumar, Krishna
dc.contributor.authorPacco, Antoine
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHuynh, Han Vinh
dc.contributor.authorMirsaidov, Utkur
dc.date.accessioned2025-04-29T06:56:40Z
dc.date.available2024-10-30T17:13:38Z
dc.date.available2025-04-29T06:56:40Z
dc.date.issued2024
dc.identifier.issn1613-6810
dc.identifier.otherWOS:001337998600001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44702.2
dc.sourceWOS
dc.titleNanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions
dc.typeJournal article
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecHolsteyns, Frank::0009-0002-2123-452X
dc.date.embargo9999-12-31
dc.identifier.doi10.1002/smll.202406713
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.beginpageArt. 2406713
dc.source.endpageN/A
dc.source.journalSMALL
dc.identifier.pmidMEDLINE:39439137
dc.source.issue51
dc.source.volume20
imec.availabilityPublished - imec
dc.description.wosFundingTextK.D. and I.E. contributed equally to this work. This work was supported by the Singapore National Research Foundation's Competitive Research Program funding (NRF-CRP23-2019-0001).


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220.500.12860/44702.2*2025-04-29T06:54:40Zvalidation by library/open access desk
120.500.12860/447022024-10-30T17:13:38Z

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