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Impact of ESD Events on TSV Liner Reliability

dc.contributor.authorChery, Emmanuel
dc.contributor.authorStucchi, Michele
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorBeyne, Eric
dc.date.accessioned2025-05-12T09:58:15Z
dc.date.available2025-03-06T20:46:06Z
dc.date.available2025-05-12T09:58:15Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001411360600049
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45329.2
dc.sourceWOS
dc.titleImpact of ESD Events on TSV Liner Reliability
dc.typeProceedings paper
dc.contributor.imecauthorChery, Emmanuel
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecChery, Emmanuel::0000-0002-2526-3873
dc.contributor.orcidimecStucchi, Michele::0000-0002-7848-0492
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.identifier.doi10.1109/IITC61274.2024.10732673
dc.identifier.eisbn979-8-3503-8517-5
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedateJUN 03-06, 2024
dc.source.conferencelocationSan Jose
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/45329.2*2025-05-12T09:57:16Zvalidation by library/open access desk
120.500.12860/453292025-03-06T20:46:06Z

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