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Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration

dc.contributor.authorHiro, Akito
dc.contributor.authorLeech, Damien
dc.contributor.authorSchoofs, Geert
dc.contributor.authorSlabbekoorn, John
dc.contributor.authorPhommahaxay, Alain
dc.contributor.authorKennes, Koen
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBeyne, Eric
dc.date.accessioned2025-06-30T11:53:57Z
dc.date.available2025-06-21T03:56:16Z
dc.date.available2025-06-30T11:53:57Z
dc.date.issued2024
dc.identifier.isbn979-8-3315-1651-2
dc.identifier.issn2164-0157
dc.identifier.otherWOS:001460256800032
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45820.2
dc.sourceWOS
dc.titleClean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration
dc.typeProceedings paper
dc.contributor.imecauthorHiro, Akito
dc.contributor.imecauthorSchoofs, Geert
dc.contributor.imecauthorSlabbekoorn, John
dc.contributor.imecauthorPhommahaxay, Alain
dc.contributor.imecauthorKennes, Koen
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorLeech, Damien
dc.contributor.orcidimecHiro, Akito::0009-0007-2262-4921
dc.contributor.orcidimecSlabbekoorn, John::0000-0002-6098-8618
dc.contributor.orcidimecPhommahaxay, Alain::0000-0001-8672-2386
dc.contributor.orcidimecKennes, Koen::0000-0002-5987-2167
dc.contributor.orcidimecBeyer, Gerald::0009-0001-0376-866X
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecLeech, Damien::0000-0002-7202-5392
dc.identifier.doi10.1109/3DIC63395.2024.10830250
dc.identifier.eisbn979-8-3315-1650-5
dc.source.numberofpages5
dc.source.peerreviewyes
dc.source.conference2024 International 3D Systems Integration Conference
dc.source.conferencedateSEP 25-27, 2024
dc.source.conferencelocationSendai
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/45820.2*2025-06-30T11:52:30Zvalidation by library/open access desk
120.500.12860/458202025-06-21T03:56:16Z

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