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Orientation dependent stress build-up during the formation of epitaxial CoSi2

dc.contributor.authorSteegen, An
dc.contributor.authorDetavernier, C.
dc.contributor.authorMaex, Karen
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorCardon, F.
dc.date.accessioned2021-10-14T13:50:21Z
dc.date.available2021-10-14T13:50:21Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4768
dc.sourceIIOimport
dc.titleOrientation dependent stress build-up during the formation of epitaxial CoSi2
dc.typeOral presentation
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy.
dc.source.conferencelocation
imec.availabilityPublished - imec


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