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The use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures

dc.contributor.authorStuer, Cindy
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBadenes, Gonçal
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-14T13:52:17Z
dc.date.available2021-10-14T13:52:17Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4780
dc.sourceIIOimport
dc.titleThe use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha
dc.source.conferencelocation
imec.availabilityPublished - imec


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