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MEMS in a Si IC environment

dc.contributor.authorBaert, Kris
dc.contributor.authorCampitelli, Andrew
dc.contributor.authorBorzi, Raffaella
dc.date.accessioned2021-10-14T16:36:27Z
dc.date.available2021-10-14T16:36:27Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5028
dc.sourceIIOimport
dc.titleMEMS in a Si IC environment
dc.typeOral presentation
dc.contributor.imecauthorBorzi, Raffaella
dc.source.peerreviewno
dc.source.conferenceCommercialisation of Microsystems Conference; 2-6 September 2001; Oxford, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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