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IR based electrodes for ferroelectric capacitor fabrication

dc.contributor.authorJohnson, Jo
dc.contributor.authorLisoni, Judit
dc.contributor.authorWouters, D. J.
dc.date.accessioned2021-10-14T17:06:43Z
dc.date.available2021-10-14T17:06:43Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5378
dc.sourceIIOimport
dc.titleIR based electrodes for ferroelectric capacitor fabrication
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceSymposium C of the MRS Fall Meeting 2001: Ferroelectrics Thin Films X; November 26-29, 2001; Boston, MA, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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