Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k materials
| dc.contributor.author | Lanckmans, Filip | |
| dc.contributor.author | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T17:13:33Z | |
| dc.date.available | 2021-10-14T17:13:33Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5430 | |
| dc.source | IIOimport | |
| dc.title | Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k materials | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.source.peerreview | no | |
| dc.source.conference | European Workshop on Materials for Advanced Metallization; 5-7 March 2001; Sigtuna, Sweden. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
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