Counting atoms on the nm-scale
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T18:12:36Z | |
| dc.date.available | 2021-10-14T18:12:36Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5779 | |
| dc.source | IIOimport | |
| dc.title | Counting atoms on the nm-scale | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.source.peerreview | no | |
| dc.source.conference | Secondary Ion Mass Spectrometry - EMAS; May 2001; Tampere, FL, USA. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
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