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Two-dimensional dopant profiling using scanning probe microscopy

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorEyben, Pierre
dc.contributor.authorXu, Mingwei
dc.contributor.authorFouchier, Marc
dc.contributor.authorAlvarez, David
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-14T21:33:39Z
dc.date.available2021-10-14T21:33:39Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6294
dc.sourceIIOimport
dc.titleTwo-dimensional dopant profiling using scanning probe microscopy
dc.typeOral presentation
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceRecent Developments in Nanoscience
dc.source.conferencedate11/01/2002
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - imec


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