ARIBA, An All Round Ion Beam Acquisition Program
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | De Coster, Walter | |
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Wils, D. | |
| dc.contributor.author | Vandesteene, N. | |
| dc.date.accessioned | 2021-09-29T12:39:58Z | |
| dc.date.available | 2021-09-29T12:39:58Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/62 | |
| dc.source | IIOimport | |
| dc.title | ARIBA, An All Round Ion Beam Acquisition Program | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.source.peerreview | no | |
| dc.source.conference | 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U | |
| imec.availability | Published - imec |
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