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Impact of the oxygen concentration on the quantification of secondary ion mass spectrometry profiles in Si

dc.contributor.authorJanssens, Tom
dc.date.accessioned2021-10-14T21:53:53Z
dc.date.available2021-10-14T21:53:53Z
dc.date.issued2002-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6430
dc.sourceIIOimport
dc.titleImpact of the oxygen concentration on the quantification of secondary ion mass spectrometry profiles in Si
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVerbeke, O.
dc.contributor.thesisadvisorVandervorst, Wilfried
imec.availabilityPublished - open access


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