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Selective nucleation of PZT on pre-patterned IrO2

dc.contributor.authorJohnson, Jo
dc.contributor.authorLisoni, Judit
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T21:56:42Z
dc.date.available2021-10-14T21:56:42Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6447
dc.sourceIIOimport
dc.titleSelective nucleation of PZT on pre-patterned IrO2
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium P: Advanced Materials for Microelectronics: Ferroelectrics and Low-k Dielectrics
dc.source.conferencedate18/06/2002
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec
imec.internalnotesPaper P-I.5


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