Show simple item record

Top Surface Imaging: A Technique towards sub-0.25 mm Optical Lithography

dc.contributor.authorGoethals, Mieke
dc.date.accessioned2021-09-29T13:06:45Z
dc.date.available2021-09-29T13:06:45Z
dc.date.issued1995-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/659
dc.sourceIIOimport
dc.titleTop Surface Imaging: A Technique towards sub-0.25 mm Optical Lithography
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisor: Prof. Dr. Ir. G. Declerck


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record