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Thin oxide C-V measurements and reliability in thin oxides

dc.contributor.authorSchmitz, Jurriaan
dc.contributor.authorDegraeve, Robin
dc.date.accessioned2021-10-14T23:04:15Z
dc.date.available2021-10-14T23:04:15Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6799
dc.sourceIIOimport
dc.titleThin oxide C-V measurements and reliability in thin oxides
dc.typeOral presentation
dc.contributor.imecauthorDegraeve, Robin
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate8/04/2002
dc.source.conferencelocationCork Ireland
imec.availabilityPublished - imec


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