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Characterization of oxygen and oxygen-related defects in high and lowly doped silicon

dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-14T23:10:06Z
dc.date.available2021-10-14T23:10:06Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6826
dc.sourceIIOimport
dc.titleCharacterization of oxygen and oxygen-related defects in high and lowly doped silicon
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and Devices
dc.source.conferencedate18/06/2002
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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