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Limitations and strength of secondary ion mass spectrometry for semiconductor characterization: are we counting atoms on the nm-scale?

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T23:43:13Z
dc.date.available2021-10-14T23:43:13Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6976
dc.sourceIIOimport
dc.titleLimitations and strength of secondary ion mass spectrometry for semiconductor characterization: are we counting atoms on the nm-scale?
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSymposium on In-line SIMS
dc.source.conferencedate1/10/2002
dc.source.conferencelocationPovo Italy
imec.availabilityPublished - imec


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