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Advanced characterization techniques for 2D-profiling and high-k materials

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T23:43:25Z
dc.date.available2021-10-14T23:43:25Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6977
dc.sourceIIOimport
dc.titleAdvanced characterization techniques for 2D-profiling and high-k materials
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference5th Annual Workshop on Semiconductor Advances for Future Electronics - SAFE
dc.source.conferencedate27/11/2002
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - imec


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