Show simple item record

Materials characterization for deep submicron technology

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T23:43:49Z
dc.date.available2021-10-14T23:43:49Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6979
dc.sourceIIOimport
dc.titleMaterials characterization for deep submicron technology
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInstitute for Microelectronics - IME
dc.source.conferencedate27/08/2002
dc.source.conferencelocationSingapore
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record