Show simple item record

Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe

dc.contributor.authorCaymax, Matty
dc.contributor.authorLeong, W. Y.
dc.contributor.editorNijs, Johan
dc.date.accessioned2021-09-29T12:40:06Z
dc.date.available2021-09-29T12:40:06Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/73
dc.sourceIIOimport
dc.titleLow Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe
dc.typeBook chapter
dc.contributor.imecauthorCaymax, Matty
dc.source.peerreviewno
dc.source.beginpage141
dc.source.bookAdvanced Silicon and Semiconducting Silicon Alloy-Based Materials and Devices
dc.source.endpage183
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record