Show simple item record

Damage-free removal of nano-sized particles, heading towards a red brick wall

dc.contributor.authorMertens, Paul
dc.contributor.authorFyen, Wim
dc.contributor.authorVereecke, Guy
dc.contributor.authorXu, Kaidong
dc.contributor.authorLauerhaas, J.
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorVan Doorne, Patrick
dc.contributor.authorKesters, Els
dc.contributor.authorVos, Rita
dc.date.accessioned2021-10-15T05:44:03Z
dc.date.available2021-10-15T05:44:03Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7899
dc.sourceIIOimport
dc.titleDamage-free removal of nano-sized particles, heading towards a red brick wall
dc.typeOral presentation
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVos, Rita
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceInternational Sematech Wafer Cleaning and Surface Preparation Workshop
dc.source.conferencedate1/05/2003
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record