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Evaluation of megasonic cleaning for particle removal efficiency and damaging

dc.contributor.authorVereecke, Guy
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorXu, Kaidong
dc.contributor.authorLux, Marcel
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.contributor.authorLoper, S.
dc.contributor.authorGrothe, P.
dc.date.accessioned2021-10-15T07:38:55Z
dc.date.available2021-10-15T07:38:55Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8366
dc.sourceIIOimport
dc.titleEvaluation of megasonic cleaning for particle removal efficiency and damaging
dc.typeOral presentation
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conference3rd Annual FSI Surface Conditioning Symposium
dc.source.conferencedate9/07/2003
dc.source.conferencelocationChaska USA
imec.availabilityPublished - imec


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