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Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results

dc.contributor.authorTonova, Diana
dc.contributor.authorDepas, Michel
dc.contributor.authorLibezny, Milan
dc.contributor.authorHeyns, Marc
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T13:17:49Z
dc.date.available2021-09-29T13:17:49Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/912
dc.sourceIIOimport
dc.titleSingle Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results
dc.typeOral presentation
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.conferenceWISE: Workshop International on Spectroscopic Ellipsometry; February 9-11, 1995; Erlangen, Germany.
dc.source.conferencelocation
imec.availabilityPublished - imec


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