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Verification of 2D SRP by the Analysis of Known Lateral Profiles

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorCaymax, Matty
dc.contributor.authorPrivitera, Vittorio
dc.date.accessioned2021-09-29T13:21:11Z
dc.date.available2021-09-29T13:21:11Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/963
dc.sourceIIOimport
dc.titleVerification of 2D SRP by the Analysis of Known Lateral Profiles
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.source.peerreviewno
dc.source.conferenceProceedings of the 3rd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semico
dc.source.conferencelocation
imec.availabilityPublished - imec


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