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Using self-assembled monolayers as model substrates for atomic layer Deposition

dc.contributor.authorWhelan, Caroline
dc.contributor.authorDemas, A.C.
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T17:52:53Z
dc.date.available2021-10-15T17:52:53Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9911
dc.sourceIIOimport
dc.titleUsing self-assembled monolayers as model substrates for atomic layer Deposition
dc.typeOral presentation
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceIVC-16
dc.source.conferencedate28/06/2004
dc.source.conferencelocationVenice Italy
imec.availabilityPublished - imec


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