Authors
Tanaka, Yoichi;
Gan, Nobuko;
Ogawa, Yuuichi;
Iino, Hideaki;
Homkar, Suvidyakumar;
Chang, Ren-Jie;
Alessio Verni, Giuseppe;
Givens, Michael;
Lai, Ju Geng;
Pacco, Antoine;
Brus, Stephan;
Arimura, Hiroaki;
Oniki, Yusuke;
Altamirano Sanchez, Efrain;
Holsteyns, Frank;
Horiguchi, Naoto
ISSN
1012-0394
Conference
UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces
Journal
Solid State Phenomena Vol. 346
Research discipline
Electrical & electronic engineering
Title
Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water
Publication type
Proceedings paper
Embargo date
9999-12-31
